Ceramic substrate general specifications and tolerances

Use the tolerances and specifications listed below as general engineering guidelines. But please note: we have the capability to yield significantly tighter tolerances based upon your requirements and/or the demands of specific applications. Our coordinate measuring system has resolution capability to within 1 micron repeatability and to within 6 microns X-Y linear accuracy. Unless otherwise noted on your specifications, our standard tolerances (shown below) will be applied.

Specifications shown in inches. To convert:
inches   millimeters  
=

Minimum distance between laser machined features or singulated edges: Greater than or equal to ceramic thickness when measured from the most narrow distance between features.

Average scribe depth and laser pulse spacing: per table below

Substrate
Thickness
Ref. Pulse Depth,
External Scribe
Avg. Pulse Depth,
Internal Scribe
Avg. Pulse Spacing,
Internal Scribe
0.010” 40-70% 35-65% 0.003-0.005”
0.015” 40-65% 35-65% 0.004-0.006”
0.020” 40-65% 35-65% 0.004-0.006”
0.025” 45-65% 35-65% 0.005-0.007”
0.030” 45-65% 40-65% 0.005-0.007”
0.040” 45-70% 45-70% 0.006-0.008”
> 0.040” 50-70% 50-70% 0.006-0.008”

Internal machined or scribed feature to internal feature: tolerance ± 0.001”, non-cumulative.

Overall length and width tolerance for cut edges: ± 0.002”

Length and width tolerance for singulated edges:

Substrate
Thickness
Tolerance
< 0.016” +0.003/-0.002”
0.017-0.030” +0.004/-0.003”
0.031-0.040” +0.005/-0.003”
0.041-0.060” +0.006/-0.004”
> 0.061 +0.007/-0.005”

Singulated edge to internal feature: tolerance +0.003/-0.002” (Figure 1)

Hole diameter: ±0.002” for Exit Diameter (Figure 3)

Hole taper: tolerance 10% of substrate thickness, 0.005” maximum (Figure 3)

As-fired edge to internal feature, mechanically aligned: tolerance ±0.010”

As-fired edge to internal feature, optically aligned: tolerance ±0.005”

Optically determined feature to internal feature, optically aligned: tolerance ±0.002”

Slag height: 0.001” maximum above ceramic surface when measured with a micrometer.

Thickness, non-lapped: ±10% of standard manufacturer’s thicknesses.

Thickness, lapped: per lapping purchase order specifications.

Surface finish, non-polished: per table below.

Substrate Type Finish
96% Alumina 15-35 microinches
99.6% Alumina 3-5 microinches
Aluminum Nitride, Thick Film 15-35 microinches

Surface finish, polished: per polishing purchase order specifications.

Camber, as fired:

Substrate Thickness Camber
<= 0.010” +0.004”/inch
0.011-0.030” +0.003”/inch
0.031-0.040” +0.002”/inch
> 0.041” +0.003”/inch


Figure 1. Lasered ceramic substrate:

(a) Typical view

fig1a

(b) Singulated edge and feature tolerance

fig1b


Figure 2. Typical laser scribed line:

(a) Top View ["A" Face of Substrate]

fig2a

(b) Cross Section

fig2b


Figure 3. Typical laser drilled features (cross section)

fig3

  Ceramic Specialty


Overview
Secondary Processing
Ceramic Specifications
Ceramic Definitions
Ceramic Inventory
Frequently Asked Questions




































































































































































All Rights Reserved. Copyright ©2010 by Laser Services.

ISO 9001:2008 Registered       AS9100 Registered