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Ceramic substrate general specifications and tolerances
Use the tolerances and specifications listed below as general engineering guidelines. But please note: we have the capability to yield significantly tighter tolerances based upon your requirements and/or the demands of specific applications. Our coordinate measuring system has resolution capability to within 1 micron repeatability and to within 6 microns X-Y linear accuracy. Unless otherwise noted on your specifications, our standard tolerances (shown below) will be applied.
Minimum distance between laser machined features or singulated edges: Greater than or equal to ceramic thickness when measured from the most narrow distance between features.
Average scribe depth and laser pulse spacing: per table below
Substrate Thickness |
Ref. Pulse Depth, External Scribe |
Avg. Pulse Depth, Internal Scribe |
Avg. Pulse Spacing, Internal Scribe |
| 0.010” |
40-70% |
35-65% |
0.003-0.005” |
| 0.015” |
40-65% |
35-65% |
0.004-0.006” |
| 0.020” |
40-65% |
35-65% |
0.004-0.006” |
| 0.025” |
45-65% |
35-65% |
0.005-0.007” |
| 0.030” |
45-65% |
40-65% |
0.005-0.007” |
| 0.040” |
45-70% |
45-70% |
0.006-0.008” |
| > 0.040” |
50-70% |
50-70% |
0.006-0.008” |
Internal machined or scribed feature to internal feature: tolerance ± 0.001”, non-cumulative.
Overall length and width tolerance for cut edges: ± 0.002”
Length and width tolerance for singulated edges:
Substrate Thickness |
Tolerance |
| < 0.016” |
+0.003/-0.002” |
| 0.017-0.030” |
+0.004/-0.003” |
| 0.031-0.040” |
+0.005/-0.003” |
| 0.041-0.060” |
+0.006/-0.004” |
| > 0.061 |
+0.007/-0.005” |
Singulated edge to internal feature: tolerance +0.003/-0.002” (Figure 1)
Hole diameter: ±0.002” for Exit Diameter (Figure 3)
Hole taper: tolerance 10% of substrate thickness, 0.005” maximum (Figure 3)
As-fired edge to internal feature, mechanically aligned: tolerance ±0.010”
As-fired edge to internal feature, optically aligned: tolerance ±0.005”
Optically determined feature to internal feature, optically aligned: tolerance ±0.002”
Slag height: 0.001” maximum above ceramic surface when measured with a micrometer.
Thickness, non-lapped: ±10% of standard manufacturer’s thicknesses.
Thickness, lapped: per lapping purchase order specifications.
Surface finish, non-polished: per table below.
| Substrate Type |
Finish |
| 96% Alumina |
15-35 microinches |
| 99.6% Alumina |
3-5 microinches |
| Aluminum Nitride, Thick Film |
15-35 microinches |
Surface finish, polished: per polishing purchase order specifications.
Camber, as fired:
| Substrate Thickness |
Camber |
| <= 0.010” |
+0.004”/inch |
| 0.011-0.030” |
+0.003”/inch |
| 0.031-0.040” |
+0.002”/inch |
| > 0.041” |
+0.003”/inch |
Figure 1. Lasered ceramic substrate:
(a) Typical view

(b) Singulated edge and feature tolerance

Figure 2. Typical laser scribed line:
(a) Top View ["A" Face of Substrate]

(b) Cross Section

Figure 3. Typical laser drilled features (cross section)

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